Varian, Inc. is a global technology company that builds leading-edge tools and solutions for diverse, high-growth applications in life science and industry.
Inspiring Excellence™
Solutions For Semiconductor Fabrication
 

Facing huge capital investment costs, manufacturers and users of semiconductor production equipment strive mightily to improve throughput and maintain uptime. As a key element of such tools, the performance of the vacuum systems can greatly affect their success. Varian, Inc. can help, once again providing innovative, dedicated vacuum solutions that reduce cycle time, extend service intervals, and maximize uptime, and that are backed by industry-leading support programs that continue throughout the lives of the production tools.

Turbo Pumps 

Scroll Pumps  

Measurement  

Leak Detection  

Components  

Turbo-V 81

Turbo-V 301 Navigator

Turbo-V 551 Navigator

Turbo-V 701 Navigator

Turbo-V 1001 Navigator

Turbo-V 3K-T

SH-110

TriScroll 300

TriScroll 600

Active Gauges

Transducers

Controllers

VS Series

PHD-4

All Valves

Flanges & Fittings

Application Note:
  Leak Testing Process Gas Components (.pdf, 220 KB)
 
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