Vacuum Pumps/
Whether you’re looking for a primary pump or an ultra high vacuum system, we have the solution for you.

Vacuum Pumps
·	Dry Scroll Pumps
·	Rotary Vane Pumps
·	Diffusion Pumps
·	Turbo Pumps
·	Ion Pumps

North America
·	Toll-free: 1.800.882.7426
·	E-mail
Europe
·	Toll-free: 00.800.234.234.00
·	E-mail
Additional Support
·	More Contact Info
·	Order a Catalog
·	FAQs

Vacuum Pumps

A pioneer in vacuum technology since the 1950s, Varian, Inc. has become a worldwide supplier of total vacuum solutions, aimed at specific applications and market requirements. This success is aided by the broadest offering of vacuum pumps, which includes...

Primary/Rough Vacuum
		Dry Scroll Pumps Oil-free, for absolutely clean applications. From atmosphere to 10^-2 mbar.
		Rotary-Vane Pumps Includes the new Smart Pumps. From atmosphere to 2 x 10^-3 mbar.
High and Ultra-High Vacuum
		Diffusion Pumps High-performance, cost-effective process pumps. From 10^-1 to 10^-8 mbar.
		Turbomolecular Pumps Process pumps with monolithic rotors and high forepressure tolerance. From 10 to 10^-10 mbar.
		Ion Pumps Ultra-high vacuum pumps in diode, noble diode, and StarCell® versions. From 10^-4 to 10^-11 mbar.

With toll-free telephone hotlines, 24-hour parts replacement, training, and constant communication, Varian is ready to be a partner to your industry.

Additional Vacuum Products & Services
·	Turbo Pumping Systems
·	Leak Detection
·	Vacuum Measurement
·	Valves
·	Components
·	Training
·	Customer Care
·	User Manuals